Modules HV

The HV Wafer Module is a flangeless high performance NEG pump solution suited for several vacuum applications requiring the distribution of large pumping speeds and capacity for H2 and all the active gases (i.e., H2O, O2, N2, CO, CO2) inside the vacuum chambers.

The NEG disks are made of the high version of the ZAO NEG alloy. Thanks to the flexibility of the ZAO technology, the benefits of the NEG pumping can be extended to the high vacuum regime (1•10-9 Torr to 1•10-7 Torr).

More HV Wafer Modules can be powered at the same time by series and/or parallel connections. SAES can support and recommend the best electrical parameters and installation of multiple HV Wafer Modules connection.

• High pumping speed for all active gases
• High sorption capacity and increased lifetime
• Constant pumping speed in HV, UHV and XHV
• Reversible pumping of hydrogen and its isotopes
• Operation in the presence of high magnetic fields
• Oil free and vibration free
• Low weight
• Fast pumpdown after air venting and without baking
• Capable of coping with large air leaks
• Suitable for viton sealed systems

• Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps
• Surface analysis systems
• Particle accelerators, synchrotron radiation sources and related equipment
• Process pumps for vacuum devices and deposition chambers
• Thin films deposition systems
• Portable vacuum instrumentation
• Pumping, storing and releasing hydrogen isotopes
• Impurities removal in rare gas filled devices