Getter Films (Page® technology)

Page consists of a few-microns thick getter film that can be deposited on different substrates and in a variety of patterns, to deliver long-term vacuum stability and device reliability.

The direct integration of Page film into discrete hermetic ceramic or metallic packages for vacuum or inert gas sealed devices.

A “cap” wafer for wafer-level MEMS packages, with integrated Page. film. PageWafer can be customized to meet very specific design requirements.

A pre-etched metal substrate (Kovar, AISI, other metals) covered by Page film, to be integrated in into discrete hermetic or inert gas sealed packages.

• MEMS and MOEMS
• Gyroscopes and accelerometers
• Infrared sensors
• RF devices
• Pressure sensors
• Resonators
• Optical devices
• Biomedical devices
• Time management crystal devices
• Atomic clock cells